Summary of SK HYNIX STARTS MASS PRODUCTION OF 1ANM DRAM USING EUV EQUIPMENT
SK hynix has begun mass production of 8Gb LPDDR4 mobile DRAM using its 1anm (fourth-generation 10nm) process, adopting EUV lithography in full after prior partial use. The 1anm node boosts wafer productivity by about 25% versus 1znm, improving cost competitiveness and addressing global DRAM supply-demand. SK hynix will supply these mobile DRAM products to smartphone makers from H2 2021 and plans to apply EUV across all 1anm DRAM production.
Parts used in the 1anm DRAM project:
- 8 Gigabit (Gb) LPDDR4 mobile DRAM chips
- 1anm 10nm process technology (fourth-generation 10nm node)
- Extreme Ultraviolet (EUV) lithography equipment
- Wafers for DRAM fabrication
- Photomask and photoresist materials for lithography
- Semiconductor fabrication tools for DRAM process steps
- Testing and packaging equipment for mobile DRAM
SK hynix Inc. announced that it has started this month mass production of the 8 Gigabit (Gb) *LPDDR4 mobile DRAM based on the 1anm, which is the fourth generation of the 10nm process technology.

LPDDR4 (Low Power Double Data Rate 4): Low power DRAM for mobile devices. DDR refers to DRAM with the specifications that JEDEC standardized and the generation has advanced from one to four.
As the semiconductor industry classifies the 10nm DRAM products, naming them after the alphabets, the 1a technology is the fourth generation, following the first three generations of the 1x, 1y, and 1z. SK hynix plans to provide the latest mobile DRAM products to smartphone manufacturers from the second half of 2021.
This is the first time that SK hynix adopted the *EUV equipment for mass production after proving the stability of the cutting edge lithography technology through partial adoption for its 1ynm DRAM production.
EUV (Extreme Ultraviolet): lithography technology that uses extreme ultraviolet
As technology migration continues to ultra-micro levels, an increasing number of semiconductor companies are adopting the EUV equipment for the photo process where circuit patterns are drawn on the wafer surfaces. Industry experts believe that a semiconductor company’s leadership in technology will depend on how it can fully take advantage of the EUV equipment. SK hynix plans to use the EUV technology for production of all its 1anm DRAM products going forward as it has proved the stability of the process.
SK hynix expects the new technology to bring an improvement in productivity, and further boost cost competitiveness. The company expects the 1anm technology to lead to a 25% increase in the number of DRAM chips produced from the same size of a wafer, compared with the previous 1znm node. SK hynix anticipates that the 1anm DRAM will also likely help alleviate the supply and demand conditions of the global markets following an increase in DRAM demand globally.
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- What product did SK hynix start mass producing?
SK hynix started mass production of 8Gb LPDDR4 mobile DRAM based on the 1anm process. - What is 1anm in SK hynix terminology?
1anm is the fourth-generation 10nm process technology following 1x, 1y, and 1z nodes. - Did SK hynix use EUV equipment for this production?
Yes, SK hynix adopted EUV equipment for mass production of its 1anm DRAM after partial use in 1ynm production. - Why is EUV important according to the article?
Industry experts believe leadership depends on fully taking advantage of EUV as it enables ultra-micro patterning needed for advanced nodes. - How much productivity improvement does 1anm provide versus 1znm?
SK hynix expects about a 25% increase in the number of DRAM chips per wafer compared with 1znm. - When will SK hynix provide these mobile DRAM products to smartphone makers?
SK hynix plans to provide the latest mobile DRAM products to smartphone manufacturers from the second half of 2021. - Will SK hynix use EUV for all 1anm DRAM products?
Yes, SK hynix plans to use EUV technology for production of all its 1anm DRAM products going forward. - What market effect does SK hynix anticipate from 1anm DRAM?
SK hynix anticipates the 1anm DRAM will help alleviate global supply and demand conditions amid increasing DRAM demand.